Patent Assignment
Reel/Frame 027731/0836
Assignment of Assignor's Interest
Recorded: 2012-02-20
Pages: 3
Assignee
TEXAS INSTRUMENTS INCORPORATED
12500 TI BOULEVARD, MS 3999, DALLAS, TEXAS, 75243
Covered Property
(1)
Pecvd Showerhead Configuration for Cmp Uniformity and Improved Stress