Patent Assignment
Reel/Frame 027753/0985
Assignment of Assignor's Interest
Recorded: 2012-02-23
Pages: 2
Assignor
KWAN, YIM-BUN PATRICK
Executed: 2012-02-13
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element with Low Surface Figure Deformation