Patent Assignment
Reel/Frame 027764/0007
Assignment of Assignor's Interest
Recorded: 2012-02-27
Pages: 3
Assignor
UYAMA, MASAYA
Executed: 2011-10-07
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Process for Producing Substrate and Substrate Processing Method