Patent Assignment
Reel/Frame 027764/0613
Assignment of Assignor's Interest
Recorded: 2012-02-27
Pages: 3
Assignors
NGUYEN, VICTOR
Executed: 2012-01-24
BALSEANU, MIHAELA
Executed: 2012-01-29
XIA, LI-QUN
Executed: 2012-01-23
WITTY, DEREK R.
Executed: 2012-01-24
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Low Temperature Plasma Enhanced Chemical Vapor Deposition of Conformal Silicon Carbon Nitride and Silicon Nitride Films