Patent Assignment
Reel/Frame 027768/0323
Assignment of Assignor's Interest
Recorded: 2012-02-27
Pages: 3
Assignors
DOUKI, YUICHI
Executed: 2012-02-14
HAYASHI, TOKUTAROU
Executed: 2012-02-14
IIDA, NARUAKI
Executed: 2012-02-14
ENOKIDA, SUGURU
Executed: 2012-02-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Holder Positioning Method and Substrate Processing System