Patent Assignment
Reel/Frame 027771/0635
Assignment of Assignor's Interest
Recorded: 2012-02-28
Pages: 4
Assignors
ARNZ, MICHAEL
Executed: 2012-02-10
BEYER, DIRK
Executed: 2012-02-21
HARNISCH, WOLFGANG
Executed: 2012-02-16
SCHERUEBL, THOMAS
Executed: 2012-02-21
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Device for Measuring the Relative Local Position Error of One of the Sections of an Object That Is Exposed Section by Section
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.