Patent Assignment
Reel/Frame 027799/0361
Assignment of Assignor's Interest
Recorded: 2012-03-02
Pages: 7
Assignors
SELIGSON, JOEL
Executed: 2012-02-29
SAPIENS, NOAM
Executed: 2012-02-29
KANDEL, DANIEL
Executed: 2012-02-29
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Structured Illumination for Contrast Enhancement in Overlay Metrology