Patent Assignment
Reel/Frame 027805/0216
Assignment of Assignor's Interest
Recorded: 2012-03-05
Pages: 10
Assignors
WU, JIANN LIH
Executed: 2012-02-14
LEE, BO-I
Executed: 2012-02-14
SOON KANG, HUANG
Executed: 2012-02-16
PENG, CHIH-I
Executed: 2012-02-14
YANG, CHI-MING
Executed: 2012-02-20
LIN, CHIN-HSIANG
Executed: 2012-02-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multiple Zone Temperature Control for CMP
Application:
13/372,872 →
Publication:
US 2013/0210173
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.