Patent Assignment
Reel/Frame 027816/0948
Assignment of Assignor's Interest
Recorded: 2012-02-08
Pages: 3
Assignors
GUDEMAN, CHRISTOPHER
Executed: 2012-02-06
SUMMERS, JEFFERY F.
Executed: 2012-02-06
THOMPSON, DOUGLAS L.
Executed: 2012-02-06
Assignee
INNOVATIVE MICRO TECHNOLOGY
75 ROBIN HILL ROAD, GOLETA, CALIFORNIA, 93117
Covered Property
(1)
Wafer bonding chamber with dissimilar wafer temperatures
Application:
13/385,214 →
Publication:
US 2013/0199730
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.