Patent Assignment
Reel/Frame 027847/0637
Assignment of Assignor's Interest
Recorded: 2012-03-12
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and Apparatus for Inspecting a Reflective Lithographic Mask Blank and Improving Mask Quality