Patent Assignment
Reel/Frame 027851/0508
Assignment of Assignor's Interest
Recorded: 2012-03-09
Pages: 4
Assignors
OGIHARA, TSUTOMU
Executed: 2012-01-10
UEDA, TAKAFUMI
Executed: 2012-01-12
YANO, TOSHIHARU
Executed: 2012-01-10
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Composition for Forming Silicon-Containing Film Usable Therefor