Patent Assignment
Reel/Frame 027853/0140
Assignment of Assignor's Interest
Recorded: 2012-03-13
Pages: 3
Assignors
ZHANG, JINGCHUN
Executed: 2012-03-12
WANG, ANCHUAN
Executed: 2012-03-12
INGLE, NITIN
Executed: 2012-03-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, M/S 1269, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for Etch of Metal and Metal-Oxide Films