Patent Assignment
Reel/Frame 027860/0853
Assignment of Assignor's Interest
Recorded: 2012-03-14
Pages: 4
Assignors
HIROSE, YOSHIRO
Executed: 2012-01-31
TAKASAWA, YUSHIN
Executed: 2012-01-31
KAMAKURA, TSUKASA
Executed: 2012-01-31
NAKAMURA, YOSHINOBU
Executed: 2012-01-31
SASAJIMA, RYOTA
Executed: 2012-01-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.