Patent Assignment
Reel/Frame 027861/0546
Assignment of Assignor's Interest
Recorded: 2012-03-14
Pages: 6
Assignors
CHOI, JIN
Executed: 2012-03-05
JEONG, JIN-HA
Executed: 2012-02-17
URAZAEV, VLADIMIR
Executed: 2012-02-17
LEE, HEA-YUN
Executed: 2012-02-21
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Exposure Systems for Integrated Circuit Fabrication