Patent Assignment
Reel/Frame 027870/0001
Assignment of Assignor's Interest
Recorded: 2012-03-15
Pages: 3
Assignors
MCCHESNEY, JON
Executed: 2012-03-08
PANAGOPOULOS, THEO
Executed: 2012-03-08
PATERSON, ALEX
Executed: 2012-03-08
BLAIR, CRAIG
Executed: 2012-03-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Chamber Filler Kit for Plasma Etch Chamber Useful for Fast Gas Switching