Patent Assignment
Reel/Frame 027884/0798
Assignment of Assignor's Interest
Recorded: 2012-03-19
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device Including Exposure of Oxide Semiconductor to Reducing Atmosphere