Patent Assignment
Reel/Frame 027889/0238
Assignment of Assignor's Interest
Recorded: 2012-03-19
Pages: 5
Assignors
KRAMPERT, JEFFREY E.
Executed: 2012-03-08
HERTEL, RICHARD J.
Executed: 2012-03-08
FAIRHURST, JOHN ROBERT
Executed: 2012-03-08
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method and Apparatus for Clamping and Cooling a Substrate for ION Implantation