Patent Assignment
Reel/Frame 027930/0134
Assignment of Assignor's Interest
Recorded: 2012-03-26
Pages: 2
Assignors
NAM, SANG KI
Executed: 2012-03-12
DHINDSA, RAJINDER
Executed: 2012-03-12
MARAKHTANOV, ALEXEI
Executed: 2012-03-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
A Chuck Assembly for Plasma Processing