Patent Assignment
Reel/Frame 027937/0790
Assignment of Assignor's Interest
Recorded: 2012-03-27
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2012-03-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Temperature Control Method and Plasma Processing Apparatus