Patent Assignment
Reel/Frame 027945/0862
Assignment of Assignor's Interest
Recorded: 2012-03-28
Pages: 4
Assignors
NOBORI, KAZUHIRO
Executed: 2012-03-07
EGUCHI, MASAHITO
Executed: 2012-03-07
KIMURA, TAKUJI
Executed: 2012-03-07
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI-PREFECTURE, 467-8530, JAPAN
Covered Property
(1)
Method for Producing Electrostatic Chuck and Electrostatic Chuck