Patent Assignment
Reel/Frame 027977/0438
Assignment of Assignor's Interest
Recorded: 2012-04-03
Pages: 11
Assignors
BODKE, ASHISH SUBHASH
Executed: 1998-12-29
XIE, ZHIGANG
Executed: 2012-03-17
CHANG, MEI
Executed: 2011-10-14
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods of Preventing Plasma Induced Damage During Substrate Processing