Patent Assignment
Reel/Frame 027988/0061
Assignment of Assignor's Interest
Recorded: 2012-04-04
Pages: 3
Assignors
WANG, ANCHUAN
Executed: 2012-03-28
ZHANG, JINGCHUN
Executed: 2012-03-28
INGLE, NITIN K.
Executed: 2012-03-28
LEE, YOUNG S.
Executed: 2012-03-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Selective Etch of Silicon by Way of Metastable Hydrogen Termination