Patent Assignment
Reel/Frame 027996/0777
Assignment of Assignor's Interest
Recorded: 2012-04-05
Pages: 3
Assignors
OZU, TOSHIHISA
Executed: 2012-02-16
MATSUMOTO, NAOKI
Executed: 2012-02-16
TSUKAMOTO, TAKASHI
Executed: 2012-02-16
TAKAI, KAZUTO
Executed: 2012-02-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Treatment Device and Plasma Treatment Method