Patent Assignment
Reel/Frame 027999/0492
Assignment of Assignor's Interest
Recorded: 2012-04-05
Pages: 3
Assignee
STMICROELECTRONICS S.R.L.
VIA C. OLIVETTI, 2, AGRATE BRIANZA, 20864, ITALY
Covered Property
(1)
Apparatus for Processing Semiconductor Wafers, in Particular for Carrying Out a Polymers Removal Process Step