Patent Assignment
Reel/Frame 028005/0840
Assignment of Assignor's Interest
Recorded: 2012-04-06
Pages: 6
Assignors
NISHI, KENJI
Executed: 2012-03-13
TAKESHITA, KAZUHIRO
Executed: 2012-03-13
OGATA, NOBUHIRO
Executed: 2012-03-14
TANAKA, SATORU
Executed: 2012-03-16
MIZOTA, SHOGO
Executed: 2012-03-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium