Patent Assignment
Reel/Frame 028029/0290
Assignment of Assignor's Interest
Recorded: 2012-04-11
Pages: 8
Assignors
LIN, BO-HUNG
Executed: 2012-02-15
TSAI, MING-CHIH
Executed: 2012-02-15
CHOU, YOU-HUA
Executed: 2012-02-15
KAO, CHUNG-EN
Executed: 2012-02-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Rotation Plus Vibration Magnet for Magnetron Sputtering Apparatus