Patent Assignment
Reel/Frame 028033/0645
Assignment of Assignor's Interest
Recorded: 2012-04-12
Pages: 8
Assignors
SHIMIZU, AKIHIKO
Executed: 2012-04-05
KIMURA, FUMIHIKO
Executed: 2012-04-05
MASUDA, TAKESHI
Executed: 2012-04-05
Assignee
SUMCO CORPORATION
2-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8634, JAPAN
Covered Property
(1)
Epitaxial Growth Apparatus and Epitaxial Growth Method