Patent Assignment
Reel/Frame 028037/0165
Assignment of Assignor's Interest
Recorded: 2012-04-12
Pages: 3
Assignors
DEHE, ALFONS
Executed: 2012-03-22
WURZER, MARTIN
Executed: 2012-04-02
HERZUM, CHRISTIAN
Executed: 2012-03-22
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
MEMS Device and Method of Making a MEMS Device