Patent Assignment
Reel/Frame 028042/0253
Assignment of Assignor's Interest
Recorded: 2012-04-13
Pages: 3
Assignors
BHATTACHARYYA, KAUSTUVE
Executed: 2012-02-23
DEN BOEF, ARIE JEFFREY
Executed: 2012-02-22
KEIJ, STEFAN CAROLUS JACOBUS ANTONIUS
Executed: 2012-02-22
VANOPPEN, PETER CLEMENT PAUL
Executed: 2012-02-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method