Patent Assignment
Reel/Frame 028059/0640
Assignment of Assignor's Interest
Recorded: 2012-04-17
Pages: 3
Assignor
KOBAYASHI, YOSHIYUKI
Executed: 2012-04-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ceiling Electrode Plate and Substrate Processing Apparatus