Patent Assignment
Reel/Frame 028061/0105
Assignment of Assignor's Interest
Recorded: 2012-04-17
Pages: 3
Assignors
LEE, SANG-HYEOB
Executed: 2012-04-03
YU, SANG HO
Executed: 2012-04-03
WU, KAI
Executed: 2012-04-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Formation of Liner and Barrier for Tungsten as Gate Electrode and as Contact Plug to Reduce Resistance and Enhance Device Performance