Patent Assignment
Reel/Frame 028061/0240
Assignment of Assignor's Interest
Recorded: 2012-04-17
Pages: 3
Assignors
ZHANG, JIMIN
Executed: 2011-09-14
WANG, ZHIHONG
Executed: 2011-09-14
LEE, HARRY Q.
Executed: 2011-09-15
TU, WEN-CHIANG
Executed: 2011-09-15
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE M/S 1269, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Detection of Layer Clearing Using Spectral Monitoring