Patent Assignment
Reel/Frame 028062/0732
Assignment of Assignor's Interest
Recorded: 2012-04-18
Pages: 5
Assignors
WANG, WEN-CHUAN
Executed: 2012-02-14
LIN, SHY-JAY
Executed: 2012-02-23
LIU, PEI-YI
Executed: 2012-02-14
SHIN, JAW-JUNG
Executed: 2012-02-14
LIN, BURN JENG
Executed: 2012-02-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multiple-Grid Exposure Method