Patent Assignment
Reel/Frame 028065/0282
Assignment of Assignor's Interest
Recorded: 2012-04-18
Pages: 4
Assignor
YAMAZAWA, YOHEI
Executed: 2012-04-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus