Patent Assignment
Reel/Frame 028069/0214
Assignment of Assignor's Interest
Recorded: 2012-04-19
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Energy Beam Drawing Apparatus and Method of Manufacturing Device