Patent Assignment
Reel/Frame 028085/0860
Assignment of Assignor's Interest
Recorded: 2012-04-22
Pages: 4
Assignors
TSAI, SHANG-YING
Executed: 2012-04-13
PENG, JUNG-HUEI
Executed: 2012-04-13
HUANG, HSIN-TING
Executed: 2012-04-16
HUANG, YAO-TE
Executed: 2012-04-16
PAN, LUNG YUAN
Executed: 2012-04-16
LIN, HUNG-HUA
Executed: 2012-04-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Mems Devices and Methods of Forming the Same