Patent Assignment
Reel/Frame 028088/0144
Assignment of Assignor's Interest
Recorded: 2012-04-23
Pages: 2
Assignors
LEE, YUNG-YAO
Executed: 2012-01-30
WANG, SOPHIA
Executed: 2012-02-07
TSAI, FEI-GWO
Executed: 2012-01-31
LIU, HENG-HSIN
Executed: 2012-01-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Determining Overlay Error and Control System for Dynamic Control of Reticle Position