Patent Assignment
Reel/Frame 028101/0299
Assignment of Assignor's Interest
Recorded: 2012-04-25
Pages: 4
Assignors
CHEN, JUI-LONG
Executed: 2012-04-20
CHAO, HUI-YUN
Executed: 2012-04-20
TSEN, YEN-DI
Executed: 2012-04-20
MOU, JONG-I
Executed: 2012-04-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Systems and Methods of Automatically Detecting Failure Patterns for Semiconductor Wafer Fabrication Processes