Patent Assignment
Reel/Frame 028113/0022
Assignment of Assignor's Interest
Recorded: 2012-04-26
Pages: 3
Assignor
HEIDEN, MICHAEL
Executed: 2008-01-07
Assignee
VISTEC SEMICONDUCTOR SYSTEMS GMBH
KUBACHER WEG 4, WEILBURG, 35781, GERMANY
Covered Property
(1)
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
Application:
13/024,190 →
Publication:
US 2012/0033230