Patent Assignment
Reel/Frame 028120/0557
Assignment of Assignor's Interest
Recorded: 2012-04-27
Pages: 3
Assignors
CHEN, LUOQI
Executed: 2012-04-12
YE, JUN
Executed: 2012-04-10
CHEN, HONG
Executed: 2012-04-12
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Integration of Lithography Apparatus and Mask Optimization Process with Multiple Patterning Process