Patent Assignment
Reel/Frame 028143/0616
Assignment of Assignor's Interest
Recorded: 2012-05-02
Pages: 3
Assignors
YAMAWAKU, JUN
Executed: 2012-04-09
KOSHIMIZU, CHISHIO
Executed: 2012-04-09
MATSUDO, TATSUO
Executed: 2012-04-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Component in Processing Chamber of Substrate Processing Apparatus and Method of Measuring Temperature of the Component