Patent Assignment
Reel/Frame 028143/0887
Assignment of Assignor's Interest
Recorded: 2012-05-02
Pages: 3
Assignors
SETTON, DAVID
Executed: 2012-05-01
BHATTACHARYYA, GAUTAM
Executed: 2012-04-27
RICHARDSON, BRETT C.
Executed: 2012-04-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Insulated Dielectric Window Assembly of an Inductively Coupled Plasma Processing Apparatus