Patent Assignment
Reel/Frame 028156/0723
Assignment of Assignor's Interest
Recorded: 2012-05-04
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Synchronous Embedded Radio Frequency Pulsing for Plasma Etching