Assignment of Assignor's Interest

Recorded: 2012-05-07 Pages: 3

Assignor

ASAI, KAZUHIDE

Executed: 2012-02-21

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing System, Management Apparatus, Data Analysis Method

Application: 13/402,294 →

Publication: US 2012/0226475

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.