IP Library Assignment 047995/0462
Patent Assignment
Reel/Frame 047995/0462

Assignment of Assignor's Interest

Recorded: 2018-12-31 Pages: 13
Assignor
HITACHI KOKUSAI ELECTRIC INC.
Executed: 2018-12-05
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Properties (136)
Substrate Processing System, Management Apparatus, Data Analysis Method
Application: 13/402,294 →
Publication: US 2012/0226475
Substrate Processing Apparatus, Maintenance Method, and Maintenance Program
Application: 13/847,209 →
Publication: US 2013/0253689
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Evaporation System
Application: 13/850,735 →
Publication: US 2013/0267100
Substrate Processing Device
Application: 14/128,804 →
Publication: US 2014/0176701
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Vaporization System
Application: 14/140,837 →
Publication: US 2014/0182515
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Application: 14/293,469 →
Publication: US 2014/0357058
Substrate Processing Apparatus, Method of Controlling Substrate Processing Apparatus, Method of Maintaining Substrate Processing Apparatus, and Recording Medium
Application: 14/388,648 →
Publication: US 2015/0096494
Substrate Processing System, Substrate Processing Apparatus, Data Processing Method, and Storage Medium
Application: 14/408,164 →
Publication: US 2015/0148935
Integrated Management System, Management Device, Method of Displaying Information for Substrate Processing Apparatus, and Recording Medium
Application: 14/431,152 →
Publication: US 2015/0253762
Substrate Processing Apparatus, Heating Apparatus, Ceiling Heat Insulator, and Method of Manufacturing Semiconductor Device
Application: 14/615,073 →
Publication: US 2015/0221532
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, and Control Program
Application: 14/650,074 →
Publication: US 2015/0370245
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Recording Medium, and Cleaning Completion Determining Method
Application: 14/765,774 →
Publication: US 2015/0368794
Substrate Processing Apparatus
Application: 14/790,393 →
Publication: US 2016/0010210
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Application: 14/801,984 →
Publication: US 2015/0325447
Substrate Processing Apparatus
Application: 14/804,653 →
Publication: US 2016/0024650
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Method of Processing Substrate
Application: 14/826,756 →
Publication: US 2016/0053373
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device
Application: 14/838,682 →
Publication: US 2015/0371832
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 14/845,985 →
Publication: US 2016/0071720
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Application: 14/848,634 →
Publication: US 2016/0079101
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium
Application: 14/856,312 →
Publication: US 2016/0002789
Substrate Processing Apparatus, Gas-Purging Method, Method for Manufacturing Semiconductor Device, and Recording Medium Containing Abnormality-Processing Program
Application: 14/903,072 →
Publication: US 2016/0189993
Management Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
Application: 14/946,965 →
Publication: US 2016/0078163
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Furnace Lid
Application: 14/949,714 →
Publication: US 2016/0076149
Method of Manufacturing Semiconductor Device
Application: 14/988,078 →
Publication: US 2016/0196980
Substrate Processing Apparatus
Application: 15/006,174 →
Publication: US 2016/0276135
Substrate Processing Apparatus, and Thermocouple
Application: 15/052,137 →
Publication: US 2016/0245704
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Application: 15/057,954 →
Publication: US 2016/0201196
Method of Manufacturing Semiconductor Device, Substrate Processing Device, and Recording Medium
Application: 15/067,467 →
Publication: US 2016/0196978
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/073,084 →
Publication: US 2016/0284542
Method of Manufacturing Semiconductor Device and Recording Medium
Application: 15/075,707 →
Publication: US 2016/0293421
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/085,459 →
Publication: US 2016/0322212
Substrate Processing Apparatus
Application: 15/097,382 →
Publication: US 2016/0319424
Substrate Processing Apparatus and Furnace Opening Cover
Application: 15/128,139 →
Publication: US 2017/0088948
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium Thereof and Semiconductor Manufacturing Method by Employing Thereof
Application: 15/141,580 →
Publication: US 2016/0237560
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/175,389 →
Publication: US 2016/0365246
Method of Manufacturing Semiconductor Device and Recording Medium
Application: 15/175,533 →
Publication: US 2016/0362784
Substrate Processing Apparatus, and Storage Medium
Application: 15/187,300 →
Publication: US 2016/0376699
Substrate Processing Apparatus and Guide Portion
Application: 15/191,151 →
Publication: US 2016/0298235
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Application: 15/220,979 →
Publication: US 2017/0029945
Substrate Processing Apparatus
Application: 15/255,352 →
Publication: US 2017/0081764
Substrate Processing Apparatus Including Heating and Cooling Device, and Ceiling Part Included in the Same
Application: 15/260,907 →
Publication: US 2016/0376701
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium
Application: 15/273,875 →
Publication: US 2017/0011974
Method of Manufacturing Semiconductor Device
Application: 15/275,854 →
Publication: US 2017/0092490
Substrate Processing Apparatus
Application: 15/366,697 →
Publication: US 2017/0159181
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/376,944 →
Publication: US 2017/0170004
Method of Manufacturing Semiconductor Device
Application: 15/383,903 →
Publication: US 2017/0098561
Method for Manufacturing Semiconductor Device, Substrate-Processing Apparatus, and Recording Medium
Application: 15/386,859 →
Publication: US 2017/0103885
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/386,994 →
Publication: US 2017/0186604
Substrate Processing Apparatus
Application: 15/388,815 →
Publication: US 2017/0183775
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Application: 15/401,529 →
Publication: US 2017/0114457
Method of Processing Substrate Recording Medium, and Method of Manufacturing Semiconductor Device
Application: 15/421,162 →
Publication: US 2017/0221698
Substrate Processing Apparatus
Application: 15/422,018 →
Publication: US 2017/0218513
Substrate Processing Apparatus and Precursor Gas Nozzle
Application: 15/432,112 →
Publication: US 2017/0232457
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Application: 15/444,434 →
Publication: US 2017/0283950
Substrate Processing Apparatus Capable of Adjusting Flow Rate of Inert Gas Supplied to Substrate
Application: 15/444,878 →
Publication: US 2017/0253968
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Application: 15/456,646 →
Publication: US 2017/0271144
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus and Recording Medium
Application: 15/458,294 →
Publication: US 2017/0268105
Substrate Processing Apparatus
Application: 15/459,772 →
Publication: US 2017/0183770
Method of Manufacturing Semiconductor Device Having Air Gap Between Wirings for Low Dielectric Constant
Application: 15/460,557 →
Publication: US 2017/0287731
Processing Apparatus, Controller and Processing System
Application: 15/460,603 →
Publication: US 2017/0193243
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/463,085 →
Publication: US 2017/0294305
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/463,243 →
Publication: US 2017/0345645
Method of Manufacturing Semiconductor Device Using Plasma to Modify Surface of Silicon-Containing Films Exposed in Trench Structure, and Recording Medium
Application: 15/464,816 →
Publication: US 2017/0194135
Substrate Processing Apparatus, Device Management Controller, and Recording Medium
Application: 15/468,906 →
Publication: US 2017/0285613
Substrate Processing Apparatus
Application: 15/472,450 →
Publication: US 2017/0198397
Substrate Processing in a Process Chamber for Semiconductor Manufacturing and Apparatus Management Controller with Error Analysis
Application: 15/472,736 →
Publication: US 2017/0300044
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/474,138 →
Publication: US 2017/0301539
Substrate Processing Apparatus
Application: 15/499,559 →
Publication: US 2017/0271176
Substrate Processing Device, Manufacturing Method for Semiconductor Device, and Reaction Tube
Application: 15/513,027 →
Publication: US 2017/0294318
Method of Manufacturing Semiconductor Device
Application: 15/513,415 →
Publication: US 2017/0309490
Method of Manufacturing Semiconductor Device
Application: 15/546,136 →
Publication: US 2018/0130664
Substrate Processing Apparatus
Application: 15/591,806 →
Publication: US 2017/0243764
Method of Manufacturing Semiconductor Device
Application: 15/613,807 →
Publication: US 2017/0352745
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/620,280 →
Publication: US 2017/0365467
Method of Manufacturing Semiconductor Device
Application: 15/623,887 →
Publication: US 2017/0287716
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus, and Recording Medium
Application: 15/627,828 →
Publication: US 2017/0294302
Semiconductor Device Manufacturing Method and Recording Medium
Application: 15/630,472 →
Publication: US 2017/0287707
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/631,371 →
Publication: US 2017/0372890
Substrate Processing Apparatus
Application: 15/632,678 →
Publication: US 2017/0292188
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/642,791 →
Publication: US 2017/0298508
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/656,862 →
Publication: US 2018/0033607
Teaching Jig, Substrate Processing Apparatus, and Teaching Method
Application: 15/658,584 →
Publication: US 2018/0033666
Substrate Processing Apparatus, Lid Cover and Method of Manufacturing Semiconductor Device
Application: 15/659,967 →
Publication: US 2018/0033645
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/665,698 →
Publication: US 2018/0040475
Substrate Treatment Apparatus Including Reaction Tube with Opened Lower End, Furnace Opening Member, and Flange Configured to Cover Upper Surface of the Furnace Opening Member
Application: 15/665,917 →
Publication: US 2017/0335452
Substrate Processing Apparatus, Recording Medium, and Fluid Circulation Mechanism
Application: 15/667,106 →
Publication: US 2018/0040488
Method of Manufacturing Semiconductor Device
Application: 15/679,366 →
Publication: US 2018/0090502
Substrate-Processing Apparatus and Method of Manufacturing Semiconductor Device
Application: 15/682,730 →
Publication: US 2017/0352556
Method of Manufacturing Semiconductor Device
Application: 15/687,717 →
Publication: US 2018/0233348
Substrate Processing Apparatus
Application: 15/687,950 →
Publication: US 2018/0277405
Substrate Processing Apparatus, Nozzle Base, and Manufacturing Method for Semiconductor Device
Application: 15/692,187 →
Publication: US 2018/0087152
Substrate Processing Apparatus
Application: 15/696,220 →
Publication: US 2018/0226228
Substrate Processing Apparatus
Application: 15/697,818 →
Publication: US 2018/0076063
Substrate Processing Apparatus
Application: 15/701,977 →
Publication: US 2018/0164702
Method of Manufacturing Semiconductor Device
Application: 15/704,603 →
Publication: US 2018/0182619
Substrate Processing Apparatus and Heat Insulating Pipe Structure
Application: 15/706,028 →
Publication: US 2018/0087709
Substrate Processing Apparatus and Recording Medium
Application: 15/708,326 →
Publication: US 2018/0024536
Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Application: 15/708,597 →
Publication: US 2018/0120822
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Thermocouple Support
Application: 15/789,311 →
Publication: US 2018/0040520
Reaction Tube Structure and Substrate Processing Apparatus
Application: 15/816,125 →
Publication: US 2018/0142353
Substrate Processing Apparatus, Exhaust System and Method of Manufacturing Semiconductor Device
Application: 15/820,793 →
Publication: US 2018/0144953
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/826,252 →
Publication: US 2018/0151347
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Application: 15/854,426 →
Publication: US 2018/0182601
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device and Vaporizer
Application: 15/870,283 →
Publication: US 2018/0135176
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Baffle Structure of the Substrate Processing Apparatus
Application: 15/873,598 →
Publication: US 2018/0144908
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Application: 15/880,245 →
Publication: US 2018/0148834
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/883,962 →
Publication: US 2018/0218898
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Application: 15/900,283 →
Publication: US 2018/0174877
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/900,393 →
Publication: US 2018/0240665
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/902,532 →
Publication: US 2018/0179628
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Recording Medium, and Supply System
Application: 15/909,636 →
Publication: US 2018/0190496
Substrate Processing Apparatus, and Method for Manufacturing Semiconductor Device
Application: 15/910,888 →
Publication: US 2018/0187307
Method of Processing Substrate
Application: 15/917,131 →
Publication: US 2018/0286727
Substrate Processing Apparatus
Application: 15/918,858 →
Publication: US 2018/0204720
Substrate Processing Apparatus, Vaporization System and Mist Filter
Application: 15/919,002 →
Publication: US 2018/0274093
Substrate Processing Apparatus
Application: 15/919,674 →
Publication: US 2018/0204742
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device
Application: 15/921,168 →
Publication: US 2018/0269055
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/921,249 →
Publication: US 2018/0204735
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Application: 15/921,343 →
Publication: US 2018/0277355
Method of Manufacturing Semiconductor Device
Application: 15/922,291 →
Publication: US 2018/0204768
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/922,500 →
Publication: US 2018/0204732
Gas Supply System, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
Application: 15/923,796 →
Publication: US 2018/0202043
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/925,080 →
Publication: US 2018/0211840
Method of Manufacturing Semiconductor Device
Application: 15/925,221 →
Publication: US 2018/0211843
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/925,228 →
Publication: US 2018/0305817
Substrate Processing System, Substrate Processing Apparatus and Management Device
Application: 15/925,346 →
Publication: US 2018/0210423
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Application: 15/926,509 →
Publication: US 2018/0277364
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Application: 15/928,817 →
Publication: US 2018/0274098
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/933,085 →
Publication: US 2018/0308681
Method for Manufacturing Semiconductor Device, Non-Transitory Computer-Readable Recording Medium, and Substrate Processing Apparatus
Application: 15/933,104 →
Publication: US 2018/0286662
Substrate Retrainer and Substrate Processing Apparatus
Application: 15/940,296 →
Publication: US 2018/0286725
Method for Manufacturing Semiconductor Device, Substrate-Processing Apparatus, and Recording Medium
Application: 15/950,879 →
Publication: US 2018/0233351
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Application: 15/961,277 →
Publication: US 2018/0247819
Method of Manufacturing Semiconductor Device
Application: 15/965,457 →
Publication: US 2018/0315651
Substrate Processing Apparatus, Substrate Container Transport System and Operation Mechanism
Application: 15/988,849 →
Publication: US 2018/0265294
Substrate Processing Apparatus
Application: 16/023,820 →
Publication: US 2018/0305816
Related Assignments (20)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest May 7, 2012
From: ASAI, KAZUHIDE
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 028163/0680 →
Assignment of Assignor's Interest Mar 27, 2013
From: TAKAGI, KOSUKE; TAKEBAYASHI, YUJI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 030096/0169 →
Assignment of Assignor's Interest Apr 1, 2013
From: YONEDA, AKIHIKO; KOTANI, HIROSHI; MIZUGUCHI, YASUHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 030124/0528 →
Assignment of Assignor's Interest Mar 10, 2014
From: OKUNO, MASANORI; KATAOKA, HISAKI; MIYADA, TOMOYUKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 032394/0920 →
Assignment of Assignor's Interest Jun 2, 2014
From: OHNO, MIKIO; TAKAGI, KOSUKE; AKAE, NAONORI; TERASAKI, MASATO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 033009/0898 →
Assignment of Assignor's Interest Jun 30, 2014
From: YAMAZAKI, HIROHISA; TAKEBAYASHI, YUJI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 033209/0967 →
Assignment of Assignor's Interest Dec 16, 2014
From: KOSHIMAKI, TOSHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 034514/0735 →
Assignment of Assignor's Interest Dec 24, 2014
From: NISHIURA, SUSUMU; INOSHIMA, KAORI; MITSUI, HIROYUKI; EKKO, HIROSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 034583/0708 →
Assignment of Assignor's Interest Feb 5, 2015
From: KOSUGI, TETSUYA; TAKEWAKI, MOTOYA; UENO, MASAAKI; MURATA, HITOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 034900/0448 →
Assignment of Assignor's Interest Mar 26, 2015
From: NAKANO, MINORU; SAITOH, TSUYOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 035260/0521 →
Assignment of Assignor's Interest Jul 2, 2015
From: YANAI, HIDEHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 035971/0734 →
Assignment of Assignor's Interest Jul 2, 2015
From: SUGISHITA, MASASHI; URANO, YUUJI; MAEDA, KIYOHIKO; UENO, MASAAKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 035973/0059 →
Assignment of Assignor's Interest Jul 17, 2015
From: OGAWA, ARITO; HARADA, KAZUHIRO; KAGA, YUKINAO; ITATANI, HIDEHARU
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036121/0462 →
Assignment of Assignor's Interest Jul 21, 2015
From: TOYODA, KAZUYUKI; ASHIHARA, HIROSHI; SANO, ATSUSHI; AKAE, NAONORI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036143/0644 →
Assignment of Assignor's Interest Aug 5, 2015
From: MORITA, OSAMU; MORI, SHINICHIRO; KAMEDA, KENJI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036253/0254 →
Assignment of Assignor's Interest Aug 14, 2015
From: INADA, TETSUAKI; WADA, YUICHI; ISHISAKA, MITSUNORI; HIRANO, MITSUHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036331/0570 →
Assignment of Assignor's Interest Aug 28, 2015
From: YANAI, HIDEHIRO; HIYAMA, SHIN; SHIMADA, TOSHIYA; ABURATANI, YUKINORI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036447/0214 →
Assignment of Assignor's Interest Sep 4, 2015
From: NITTA, TAKAFUMI; SHIMAMOTO, SATOSHI; HIROSE, YOSHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036497/0004 →
Assignment of Assignor's Interest Sep 9, 2015
From: YANAI, HIDEHIRO; YANAGISAWA, YOSHIHIKO; TSUBOTA, YASUTOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036519/0673 →
Assignment of Assignor's Interest Sep 17, 2015
From: KONTANI, TADASHI; TATENO, HIDETO; UMEKAWA, ATSUSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 036587/0369 →