Teaching jig, substrate processing apparatus, and teaching method
A teaching jig includes: a first plate that determines a substrate loading position in a forward/backward direction with respect to a substrate holder which holds a substrate; a second plate that determines the substrate loading position in a leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and movable in the forward/backward direction; and a positioning target pin installed in the first plate.
1. A teaching jig comprising:
a first plate configured to, when the teaching jig is loaded in a substrate holder, be pressed against the substrate holder and indicate a substrate loading position in a forward/backward direction with respect to the substrate holder;
a second plate configured to, when the teaching jig is loaded in the substrate holder, be pressed against the substrate holder and indicate the substrate loading position in a leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and further configured to move in the forward/backward direction with respect to the first plate; and
a target pin installed in the first plate and configured not to interfere with the movement of the second plate.
2. The teaching jig of claim 1 , wherein the second plate has a circular arc portion configured to make contact with a holding member of the substrate holder, and the circular arc portion determines the substrate loading position in the leftward/rightward direction by being brought into contact with the holding member of the substrate holder.
3. The teaching jig of claim 2 , wherein a plurality of holding members is installed in the substrate holder, and the circular arc portion is configured as a part of a virtual circle having a diameter larger than a maximum distance between the holding members.
4. The teaching jig of claim 3 , wherein the second plate has a plurality of slits formed substantially in parallel with the first plate.
5. The teaching jig of claim 1 , further comprising:
a third plate configured to, when the teaching jig is loaded in the substrate holder, be pressed against the substrate holder and indicate the substrate loading position in a rotational direction with respect to the substrate holder, the third plate being further configured to move substantially in parallel with the second plate.
6. The teaching jig of claim 5 , wherein the third plate has a longitudinal length longer than a longitudinal length of the second plate.
7. The teaching jig of claim 1 , wherein the target pin has a plurality of stepped portions in an upward/downward direction, and at least one of the plurality of stepped portions has a planar front surface configured to receive a sensing signal from a sensor that senses the substrate loading position.
8. The teaching jig of claim 7 , wherein the target pin is installed in the same position as a center position of the substrate in the forward/backward direction.
9. The teaching jig of claim 1 , wherein an anti-reflection member is installed in the first plate at a rear side of the target pin.
10. A substrate processing apparatus comprising:
a sensor configured to sense positions of a teaching jig in a forward/backward direction, a leftward/rightward direction, and an upward/downward direction, respectively, the teaching jig including:
a first plate configured to, when the teaching jig is loaded in a substrate holder, be pressed against the substrate holder and indicate a substrate loading position in the forward/backward direction with respect to the substrate holder;
a second plate configured to, when the teaching jig is loaded in the substrate holder, be pressed against the substrate holder and indicate the substrate loading position in the leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and further configured to move in the forward/backward direction with respect to the first plate; and
a target pin installed in the first plate and configured not to interfere with the movement of the second plate;
a memory part that stores position information sensed by the sensor; and
a control part that teaches a substrate transfer device on the basis of the position information stored in the memory part.
11. A teaching method comprising:
sensing positions of a teaching jig in a forward/backward direction, a leftward/rightward direction, and an upward/downward direction, respectively, the teaching jig including:
a first plate configured to, when the teaching jig is loaded in a substrate holder, be pressed against the substrate holder and indicate a substrate loading position in the forward/backward direction with respect to the substrate holder;
a second plate configured to, when the teaching jig is loaded in the substrate holder, be pressed against the substrate holder and indicate the substrate loading position in the leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and further configured to move in the forward/backward direction with respect to the first plate; and
a target pin installed in the first plate and configured not to interfere with the movement of the second plate;
storing sensed position information; and
teaching a substrate transfer device on the basis of the stored position information.