Patent Assignment
Reel/Frame 033009/0898
Assignment of Assignor's Interest
Recorded: 2014-06-02
Pages: 7
Assignors
OHNO, MIKIO
Executed: 2014-05-30
TAKAGI, KOSUKE
Executed: 2014-05-30
AKAE, NAONORI
Executed: 2014-05-30
TERASAKI, MASATO
Executed: 2014-05-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.