Patent Assignment
Reel/Frame 033209/0967
Assignment of Assignor's Interest
Recorded: 2014-06-30
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Vaporization System
Application:
14/140,837 →
Publication:
US 2014/0182515
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.