Patent Assignment
Reel/Frame 034514/0735
Assignment of Assignor's Interest
Recorded: 2014-12-16
Pages: 3
Assignor
KOSHIMAKI, TOSHIRO
Executed: 2014-12-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Apparatus, Data Processing Method, and Storage Medium
Application:
14/408,164 →
Publication:
US 2015/0148935
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.