Patent Assignment
Reel/Frame 036121/0462
Assignment of Assignor's Interest
Recorded: 2015-07-17
Pages: 7
Assignors
OGAWA, ARITO
Executed: 2015-07-17
HARADA, KAZUHIRO
Executed: 2015-07-14
KAGA, YUKINAO
Executed: 2015-07-14
ITATANI, HIDEHARU
Executed: 2015-07-14
ASHIHARA, HIROSHI
Executed: 2015-07-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Application:
14/801,984 →
Publication:
US 2015/0325447
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.